Microphotonics devices based on silicon micro-fabrication technology

被引：0
|
作者：
Tsuchizawa, T [1 ]
Watanabe, T [1 ]
Yamada, K [1 ]
Shoji, T [1 ]
Takahashi, J [1 ]
Itabashi, S [1 ]
机构：
[1] NTT Corp, Microsyst Integrat Labs, Atsugi, Kanagawa 2430198, Japan
来源：
2003 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2003年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：585 / 586
页数：2
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