Modelling of columnar growth in continuum ballistic deposition

被引：5
|
作者：
Enomoto, Y [1 ]
Taguchi, M [1 ]
机构：
[1] Nagoya Inst Technol, Dept Environm Technol, Nagoya, Aichi 4668555, Japan
来源：
APPLIED SURFACE SCIENCE | 2005年 / 244卷 / 1-4期
关键词：
columnar structure; ballistic deposition; thin film; phase field model;
D O I：
10.1016/j.apsusc.2004.10.081
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The dynamics of morphological change of the growing film surface during a vertical ballistic deposition is numerically studied by means of a phenomenological model. The model is a phenomenological continuum model, described by a pair of coupled equations of the phase field for a growing film and the density field for ballistic deposited particles. Several computer simulations show that morphological transitions of the growing surface occur on varying phenomenological parameters of the model. Especially, it is found that stable columnar structures are obtained within some ranges of parameters. (c) 2004 Elsevier B.V. All rights reserved.
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页码：213 / 216
页数：4
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