Determination of edge-component Burgers vector of threading dislocations in GaN crystal by using Raman mapping

被引：13

作者：

Kokubo, Nobuhiko ^{[1
,2
]}

Tsunooka, Yosuke ^{[1
,2
]}

Fujie, Fumihiro ^{[1
]}

Ohara, Junji ^{[3
]}

Onda, Shoichi ^{[3
]}

Yamada, Hisashi ^{[2
]}

Shimizu, Mitsuaki ^{[2
]}

Harada, Shunta ^{[1
,3
]}

Tagawa, Miho ^{[1
,3
]}

Ujihara, Toru ^{[1
,2
,3
]}

机构：

[1] Nagoya Univ, Dept Mat Sci & Engn, Nagoya, Aichi 4648603, Japan

[2] Natl Inst Ind Sci & Technol AIST, GaN Adv Device Open Innovat Lab GaN OIL, Nagoya, Aichi 4648601, Japan

[3] Nagoya Univ, Inst Mat & Syst Sustainabil IMaSS, Nagoya, Aichi 4648603, Japan

来源：

APPLIED PHYSICS EXPRESS | 2018年 / 11卷 / 11期

关键词：

ATOMIC-FORCE MICROSCOPY; ELECTRICAL-PROPERTIES; GALLIUM NITRIDE; ALPHA-GAN; HVPE; CATHODOLUMINESCENCE;

D O I：

10.7567/APEX.11.111001

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The threading edge dislocations in a GaN crystal are analyzed via micro-Raman spectroscopy mapping. A clear contrast image of the E-2(H) peak shift from a higher wavenumber to a lower wavenumber is simulated. The direction from the higher-wavenumber region to the lower-wavenumber region is found to be in the 90 degrees rotation from the Burgers vector. The Burgers vector is experimentally determined to be a/3[11 (2) over bar0] using transmission electron microscopy. The magnitude of the Burgers vector agrees well between the simulated and experimental results. Thus, the density, direction, and magnitude of the edge component of the threading dislocations are identified using Raman spectroscopy mapping. (c) 2018 The Japan Society of Applied Physics

引用

页数：4

共 16 条

[1] Non-destructive identification of edge-component burgers vector of threading dislocations in SiC wafers by birefringence imaging
Harada, Shunta
Matsubara, Yasutaka
Murayama, Kenta
DIAMOND AND RELATED MATERIALS, 2023, 138
[2] Detection of edge component of threading dislocations in GaN by Raman spectroscopy
Kokubo, Nobuhiko
Tsunooka, Yosuke
Fujie, Fumihiro
Ohara, Junji
Hara, Kazukuni
Onda, Shoichi
Yamada, Hisashi
Shimizu, Mitsuaki
Harada, Shunta
Tagawa, Miho
Ujihara, Toru
APPLIED PHYSICS EXPRESS, 2018, 11 (06)
[3] Nondestructive visualization of threading dislocations in GaN by micro raman mapping
Kokubo, Nobuhiko
Tsunooka, Yosuke
Fujie, Fumihiro
Ohara, Junji
Onda, Shoichi
Yamada, Hisashi
Shimizu, Mitsuaki
Harada, Shunta
Tagawa, Miho
Ujihara, Toru
JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (SC)
[4] Using Multiple Contrast Mechanisms via Forescatter Electron Channeling Contrast Imaging to Resolve the Burgers Vector of GaN Threading Dislocations
Picard, Y. N.
Twigg, M. E.
Caldwell, J. D.
Eddy, C. R., Jr.
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Holm, R. T.
MICROSCOPY AND MICROANALYSIS, 2009, 15 : 674 - 675
[5] Identification of Burgers vectors of threading dislocations in freestanding GaN substrates via multiphoton-excitation photoluminescence mapping
Tsukakoshi, Mayuko
Tanikawa, Tomoyuki
Yamada, Takumi
Imanishi, Masayuki
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APPLIED PHYSICS EXPRESS, 2021, 14 (05)
[6] ON THE DETERMINATION OF THE BURGERS VECTOR OF QUASI-CRYSTAL DISLOCATIONS BY TRANSMISSION ELECTRON-MICROSCOPY
WOLLGARTEN, M
GRATIAS, D
ZHANG, Z
URBAN, K
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1991, 64 (04): : 819 - 833
[7] Observation of threading dislocations with a c plus m type Burgers vector in HVPE GaN substrates using multi-photon excitation photoluminescence and TEM
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JOURNAL OF CRYSTAL GROWTH, 2022, 592
[8] The Nucleation and Propagation of Threading Dislocations with c-component of Burgers Vector in PVT-Grown 4H-SiC
Wu, Fangzhen
Dudley, Michael
Wang, Huanhuan
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[9] The Burgers vector and the flow of screw and edge dislocations in finite-deformation single-crystal plasticity
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JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2006, 54 (09) : 1882 - 1898
[10] Burgers Vector Determination of Threading Screw Dislocations in 4H-SiC via Forescattered Electron Channeling Contrast Imaging
Twigg, M. E.
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Caldwell, J. D.
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MICROSCOPY AND MICROANALYSIS, 2009, 15 : 1018 - 1019

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