High resolution patterning technology: A view of the future

被引：0
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作者：
Willson, C. Grant [1 ]
机构：
[1] Univ Texas Austin, Dept Chem Engn, Austin, TX 78712 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2009年 / 237卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
19-NANO
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页数：1
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