Polyimide foam-like microstructures: technology and mechanical properties

被引:3
|
作者
Dobrzynska, J. A. [1 ]
Joris, P. [1 ]
Jiguet, S. [2 ]
Renaud, P. [1 ]
Gijs, M. A. M. [1 ]
机构
[1] Ecole Polytech Fed Lausanne, Labv Microsyst, Lausanne, Switzerland
[2] Gersteltec Sarl, Pully, Switzerland
关键词
AIR-GAPS; FABRICATION; POLYCARBONATES; MICROCHANNELS;
D O I
10.1088/0960-1317/21/10/105016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a process for the realization of polyimide films with custom-designed microporosity based on the heat-induced depolymerization of polyimide-embedded polypropylene carbonate microstructures. The foam-like microstructures are up to 40 mu m thick and incorporate air cavities with a width ranging from 20 to 200 mu m, a length up to 5 mm and a height of 20 mu m. We model the mechanical stress-strain properties of the microcavities using both analytical and numerical methods. The simulation data are in good agreement with the results of nanoindentation and microcompression experiments, which show the reduction of the effective Young's modulus from 5.77 +/- 0.06 GPa for bulk polyimide to 2.51 +/- 0.03 GPa for a foam-like layer.
引用
收藏
页数:12
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