MONOLITHIC LARGE-SCALE OPTICAL SWITCHES USING SILICON PHOTONIC MEMS

被引：0
|
作者：
Wu, Ming C. [1 ]
Han, Sangyoon [1 ]
Seok, Tae Joon [1 ]
Quack, Niels [1 ]
机构：
[1] Univ Calif Berkeley, Berkeley, CA 94720 USA
来源：
2014 OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE AND AUSTRALIAN CONFERENCE ON OPTICAL FIBRE TECHNOLOGY (OECC/ACOFT 2014) | 2014年
关键词：
LOW-POWER; RESONATORS; COMPACT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on high-port-count (50x50) fast optical circuit switches with 2.5 mu s response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9x9mm(2) dies using silicon photonic MEMS process on 220nm silicon-on-insulators.
引用
收藏
页码：625 / 626
页数：2
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