Bond reliability under humid environment for coated copper wire and bare copper wire

被引:71
|
作者
Uno, Tomohiro [1 ]
机构
[1] Nippon Steel Corp Ltd, Adv Mat & Tech Res Labs, Futtsu, Chiba 2938511, Japan
关键词
D O I
10.1016/j.microrel.2010.03.006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There is growing interest in Cu wire bonding for LSI interconnection due to cost savings and better electrical and mechanical properties. Conventional bare Cu bonding wires, in general, are severely limited in their use compared to Au wires. A coated Cu bonding wire (EX1) has been developed for LSI application. EX1 is a Pd-coated Cu wire to enhance the bondability. Bond reliability at a Cu wire bond under a humid environment is a major concern in replacing Au wires. The bond reliability of EX1 and bare Cu was compared in the reliability testing of PCT and UHAST (Unbiased HAST). The lifetimes for EX1 and the bare Cu in PCT testing were over 800 h and 250 h, respectively. Humidity reliability was significantly greater for EX1. Continuous cracking was formed at the bond interface for the bare Cu wire. Corrosion-induced deterioration would be the root cause of failure for bare Cu wires. The corrosion was a chemical reaction of Cu-Al IMC (InterMetallic Compound) and halogens (Cl, Br) from molding resins. EX1 improves the bond reliability by controlling diffusion and IMC formation at the bond interface. The excellent humidity reliability of the coated Cu wire, EX1 is suitable for 151 application. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:148 / 156
页数:9
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