[1] Chinese Acad Sci, Inst Microelect, Beijing, Peoples R China
[2] Univ Chinese Acad Sci, Beijing, Peoples R China
[3] Fudan Microelect Grp, Shanghai, Peoples R China
[4] Chinese Acad Sci, Key Lab Silicon Devices & Technol, Beijing, Peoples R China
[5] Chinese Acad Sci, Xinjiang Tech Inst Phys & Chem, Urumqi, Peoples R China