Fabrication of Photosensitive YBCO Gel Film by Sol-gel Process

被引:0
|
作者
Zhao, Gui-rong [1 ]
Zhao, Gao-yang [1 ]
Zhang, Huang-li [1 ]
机构
[1] Xian Univ Technol, Sch Mat Sci & Engn, Xian, Peoples R China
关键词
YBCO film; chemical modification; photosensitivity; fine pattern;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
YBCO superconducting film has attracts great attentions and has wide applications in the field of electronics such as filters, infrared detectors, THz antennas, etc. In the application of YBCO films, the preparation of its fine patterns with high performance plays a key role. In the paper, The photosensitive chelates are formed in YBCO gel films by chemical modification, Based on the photosensitivity of the YBCO gel films, YBCO patterned films were fabricated by irradiating the gel film with UV light through a mask followed by dissolving the non-irradiated area in a suitable solvent. After the patterned YBCO gel films were heat treated, patterned YBCO superconducting films were obtained.
引用
收藏
页码:1854 / 1856
页数:3
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