Simulation of growth of silicon nanowhiskers with Ge-Si heterojunctions

被引:0
|
作者
Nastovjak, A. G. [1 ]
Neizvestny, I. G. [1 ]
Shwartz, N. L. [1 ]
机构
[1] Russian Acad Sci, Siberian Branch, Rzhanov Inst Semicond Phys, Novosibirsk 630090, Russia
来源
JOURNAL OF SURFACE INVESTIGATION | 2011年 / 5卷 / 05期
基金
俄罗斯基础研究基金会;
关键词
FIELD-EFFECT TRANSISTORS; MOLECULAR-BEAM EPITAXY; NANOWIRES; DEVICES; SI(111); SURFACE;
D O I
10.1134/S1027451011090114
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The process of formation of Si-Ge heterostructures based on nanowhiskers (NWs) grown according to the vapor-liquid-solid mechanism is studied using the Monte Carlo simulation. It is found that, during growth of axial heterojunctions (HJs), it is impossible to obtain an atomically flat Si-Ge HJ, which is related to a gradual change in the catalyst-drop composition during the switch between fluxes. The dependence of the composition of the Ge (x) Si1 - x transition layer on the ratio of fluxes and on the Ge and Si deposition time is studied. It is found that the width of the axial Si-Ge HJs depends on the NW diameter. It depends linearly on the diameter under the adsorption-induced growth conditions and decreases with increasing diameter under the diffusion-induced growth conditions. This means that, as the NW thickness decreases, abrupt HJs in the Ge-Si system can be obtained only in the case of chemical-vapor-deposition growth in which the diffusion-induced growth component is insignificant.
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页码:870 / 877
页数:8
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