[Y(dbm)3(H2O)]: Synthesis, thermal behavior and spin-coating precursor for Y2O3 layer formation

The synthesis, structure and thermal behavior of [Y(dbm)(3)(H2O)] (3) (dbm = 1,3-drphenyl-1,3-propandronate) and its use as a spin-coating precursor for Y2O3 deposition is reported. Complex 3 was prepared by the reaction of [Y(NO3)(3)center dot 6H(2)O] (1) with 3 equiv of Hdbm (2) in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C-1 symmetric crystallographically independent species of 3 possess a YO7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry (Lambda enantiomer). Complex 3 forms a ID chain, due to intermolecular hydrogen bonds between the coordinated H2O molecule and the O atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40-800 degrees C and 40-1300 degrees C under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction (PXRD) measurements of the residues confirmed the formation of Y2O3. Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SrO2 film, or with a native oxide layer. The as-deposited Y2O3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively. (c) 2017 Published by Elsevier B.V. on behalf of Chinese Society of Rare Earths.