Compact pnCCD-Based X-ray Camera with High Spatial and Energy Resolution: A Color X-ray Camera

被引:91
|
作者
Scharf, O. [1 ]
Ihle, S. [2 ]
Ordavo, I. [3 ]
Arkadiev, V.
Bjeoumikhov, A. [4 ,5 ]
Bjeoumikhova, S. [5 ]
Buzanich, G. [1 ]
Gubzhokov, R. [5 ]
Guenther, A. [5 ]
Hartmann, R. [2 ]
Kuehbacher, M. [6 ]
Lang, M. [2 ]
Langhoff, N. [5 ]
Liebel, A. [3 ]
Radtke, M. [1 ]
Reinholz, U. [1 ]
Riesemeier, H. [1 ]
Soltau, H. [2 ]
Strueder, L. [7 ,8 ]
Thuenemann, A. F. [1 ]
Wedell, R. [4 ]
机构
[1] BAM Fed Inst Mat Res & Testing, D-12489 Berlin, Germany
[2] PNSensor GmbH, D-80803 Munich, Germany
[3] PNDetector GmbH, D-81735 Munich, Germany
[4] Inst Angew Photon eV IAP, D-12489 Berlin, Germany
[5] IFG Inst Sci Instruments GmbH, D-12489 Berlin, Germany
[6] Helmholtz Ctr Berlin Mat & Energy, D-14109 Berlin, Germany
[7] Max Planck Inst Extraterr Phys, D-85748 Garching, Germany
[8] Max Planck Inst Halbleiterlabor, D-81739 Munich, Germany
关键词
XRF; DETECTOR;
D O I
10.1021/ac102811p
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
For many applications there is a requirement for nondestructive analytical investigation of the elemental distribution in a sample. With the improvement of X-ray optics and spectroscopic X-ray imagers, full field X-ray fluorescence (FF-XRF) methods are feasible. A new device for high-resolution X-ray imaging, an energy and spatial resolving X-ray camera, is presented. The basic idea behind this so-called "color X-ray camera" (CXC) is to combine an energy dispersive array detector for X-rays, in this case a pnCCD, with polycapillary optics. Imaging is achieved using multiframe recording of the energy and the point of impact of single photons. The camera was tested using a laboratory 30 mu m microfocus X-ray tube and synchrotron radiation from BESSY 11 at the BAMline facility. These experiments demonstrate the suitability of the camera for X-ray fluorescence analytics. The camera simultaneously records 69 696 spectra with an energy resolution of 152 eV for manganese K(alpha) with a spatial resolution of 50 mu m over an imaging area of 12.7 x 12.7 mm(2). It is sensitive to photons in the energy region between 3 and 40 keV, limited by a 50 mu m beryllium window, and the sensitive thickness of 450 mu m of the chip. Online preview of the sample is possible as the software updates the sums of the counts for certain energy channel ranges during the measurement and displays 2-D false-color maps as well as spectra of selected regions. The complete data cube of 264 x 264 spectra is saved for further qualitative and quantitative processing.
引用
收藏
页码:2532 / 2538
页数:7
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