Design and dynamic evaluation for a linear ultrasonic stage using the thin-disc structure actuator

被引：8
|
作者：
Wen, Fuhliang [1 ]
Yen, C. -Y. [2 ]
机构：
[1] St Johns Univ, Grad Sch Automat & Mechatron, Dept Mech & Comp Aided Engn, Taipei 25135, Taiwan
[2] Natl United Univ, Dept Elect Engn, Miaoli 360, Taiwan
来源：
ULTRASONICS | 2007年 / 47卷 / 1-4期
关键词：
edge-driving actuator; ultrasonic actuating stage; piezoceramic; friction contact; laser-Doppler measurement; performance evaluation;
D O I：
10.1016/j.ultras.2007.06.005
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
The design of a novel, single-axis ultrasonic actuating stage has been proposed. It consists of a movable plate, an edge-driving ultrasonic actuator as an actuating device, and a magnetic Magi encoder as a position sensor. The stage is impelled using a friction-contact mechanism by the ultrasonic actuator with long distance movement. Very high actuating and braking abilities are obtained. The stable and precise positioning control of the stage was achieved by using a neural-fuzzy controller. This simple and inexpensive structure of the single-axis stage demonstrates that the mechanical design of ultrasonic actuating concept could be done flexibly according to the requirements for various applications. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：23 / 31
页数：9
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