The effect of annealing on the structure and magnetic properties of FeCoN thin films

FeCoN films with 10 at.% Co content were prepared by the sputtering method. The effect of annealing on the structure and magnetic properties of FeCoN films was investigated. The as-deposited FeCoN films consist of alpha'-(Fe, Co) martensite. Annealing at 150-200 degrees C alpha'-(Fe, Co) martensite transforms into the alpha "-(Fe, Co)(16)N-2 phase. The alpha "-(Fe, Co)(16)N-2 formed at 150-200 degrees C decomposes into alpha-(Fe, Co) and gamma'-(Fe, Co)(4)N at annealing temperature T-a = 450 degrees C, and it disappears in the FeCoN film annealed at T-a = 500 degrees C The FeCoN films annealed at 150-400 degrees C show very high saturation magnetization 4 pi M-s = 25-27 kG, which confirms the high saturation magnetization of the alpha "-(Fe, Co)(16)N-2.