Improved magnetic anisotropy and magnetostriction by laminating FeAl(N) with permalloy to multilayers

被引:6
|
作者
Maass, W [1 ]
Rohrmann, H [1 ]
机构
[1] Balzers Proc Syst, D-63755 Alzenau, Germany
关键词
FeAlN; permalloy; multilayer; high B-s;
D O I
10.1109/20.706574
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High B-S FeAl(N) single and FeAl(N)/NiFe multilayer films have been prepared by RF-Diode sputtering in a Ar/N-2 mixture on substrates up to 6 " diameter using a commercial sputter machine. Preparing the films under an aligning magnetic field led to an uniaxial anisotropy with angular dispersions less than 1 degrees. A magnetostriction of lambda less than or equal to 1*10(-6) and H-C,H- H-K approximate to 2.5 Oe was achieved for single films. The FeAl(N)/NiFe multilayers display an improved anisotropic behaviour and smaller H-C and lambda(S) although B-S is only somewhat below the alpha-Fe value. Depending on layer periodicity, H-K varies between 2.3 and 6 Oe for 0.5 mu m thick films.
引用
收藏
页码:1435 / 1437
页数:3
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