Development of a micro-optical distance sensor with electrical I/O interface

被引：0
|
作者：
Oka, T [1 ]
Nakajima, H [1 ]
Shiratsuki, A [1 ]
Tsugai, M [1 ]
Wallrabe, U [1 ]
Hollenbach, U [1 ]
Krippner, P [1 ]
Mohr, J [1 ]
机构：
[1] Mitsubishi Electr Corp, Ind Elect & Syst Lab, Amagasaki, Hyogo 6618661, Japan
来源：
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2001年
关键词：
optical distance sensor; micro-optical sensor; LIGA technology;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A micro-optical distance sensor has been developed by a combination of LIGA technology and Si micro machining in order to meet industrial demands for miniaturization. The function of the distance sensor is based on the triangulation principle. Our sensor consists of optical components made by the LIGA process, i.e. a free space micro-optical system and micro-cylindrical lenses, and an electrical base with opto-electrical devices. Two types of sensor with measurement ranges of 1 mm and 10 mm have been designed and fabricated. The dimensions of the sensor chip are 7 mm (W) x 7 mm (L) x 3 mm (H).
引用
收藏
页码：536 / 539
页数：4
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