Photoinduced Processes in Thin Films of MoO3 and Mixed V2O5: MoO3 Oxides

被引:4
|
作者
Sviridova, T. V. [1 ]
Sadovskaya, L. Yu. [1 ]
Kokorin, A. I. [2 ]
Lapchuk, N. M. [1 ]
Sviridov, D. V. [1 ]
机构
[1] Belorusian State Univ, Dept Chem, Minsk, BELARUS
[2] Russian Acad Sci, Semenov Inst Chem Phys, Moscow, Russia
基金
俄罗斯基础研究基金会;
关键词
molybdenum oxide; vanadium oxide; photopolymerization; photolithography; thin films; inorganic photoresist materials; MECHANICALLY ACTIVATED MOO3; MOLYBDENUM-VANADIUM OXIDES; CATALYTIC-OXIDATION; IONS; ESR;
D O I
10.1134/S1990793116040126
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
Photoinduced processes in thin films of MoO3 and mixed V2O5:MoO3 oxides prepared by polycondensation of the respective oxoacids under solvothermal conditions are studied using Raman spectroscopy, ESR, and AFM. It is shown that, under UV irradiation, the photoinduced polycondensation occurs in the oxide films, leading to the formation of the oxygen bridges, an effect that opens up the possibility of developing a new photolithographic process.
引用
收藏
页码:561 / 565
页数:5
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