Influence of the Discharge Burning Conditions on Distributions of the Parameters of Plasma Generated in a Non-Self-Sustaining Glow Discharge Inside a Hollow Cathode

The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma formed by the plasma source with a combined PINK heated and hollow cathode. The dependences and combustion modes of the non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06-1.4) Pa and a combustion voltage of (70-300) V. Studies of the plasma parameters using double Langmuir probes have shown that this discharge system provides generation of the nitrogen plasma inside the hollow cathode with inhomogeneity from +/- 12 to +/- 63%.