Photonic crystal waveguides by direct writing of e-beam on self-assembled photonic crystals

被引：8
|
作者：
Kedia, Sunita [1 ]
Vijaya, R. [1 ]
机构：
[1] Indian Inst Technol, Dept Phys, Bombay 400076, Maharashtra, India
来源：
BULLETIN OF MATERIALS SCIENCE | 2011年 / 34卷 / 02期
关键词：
Photonic crystals; waveguides; electron beam lithography; LITHOGRAPHY; FABRICATION;
D O I：
10.1007/s12034-011-0063-y
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Direct electron beam lithography technique is used for writing a variety of waveguide structures on thin films of polymethyl methacrylate (PMMA) and self-assembled three-dimensionally ordered photonic crystals made up of PMMA colloidal spheres. The waveguide structures fabricated on both these type of samples are characterized by scanning electron microscope and optical microscope images.
引用
收藏
页码：383 / 388
页数：6
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