AN ULTRA-HIGH-QUALITY FACTOR SILICON DISK RESONATOR

被引：0
|
作者：
Sobreviela, Guillermo [1 ]
Zou, Xudong [1 ]
Zhao, Chun [1 ]
Pandit, Milind [1 ]
Seshia, Ashwin A. [1 ]
机构：
[1] Univ Cambridge, Nanosci Ctr, Dept Engn, Cambridge, England
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
英国工程与自然科学研究理事会; “创新英国”项目;
关键词：
Microelectromechanical resonators; oscillators; Quality factor; ring-down measurements;
D O I：
10.1109/transducers.2019.8808211
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A disk resonator demonstrates an ultrahigh-quality factor (Q similar to 10(7)) at room temperature, When embedded in a board-level feedback oscillator an excellent short-term stability (340 ppt @ Is integration time) is measured. The use of a new higher-order bulk mode in the disk in combination with the anchor alignment with the nodal locations enables minimization of anchor losses, boosting the resonator quality factor.
引用
收藏
页码：527 / 530
页数：4
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