Effects of air annealing on the structure, resistivity, infrared emissivity and transmission of indium tin oxide films

被引：35

作者：

Sun, Kewei ^{[1
]}

Zhou, Wancheng ^{[1
]}

Tang, Xiufeng ^{[1
]}

Huang, Zhibin ^{[1
]}

Luo, Fa ^{[1
]}

Zhu, Dongmei ^{[1
]}

机构：

[1] NW Polytech Univ, Sch Mat Sci & Engn, State Key Lab Solidificat Proc, Xian 710072, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2012年 / 206卷 / 19-20期

基金：

中国国家自然科学基金;

关键词：

Indium tin oxide films; Direct current magnetron sputtering; Infrared emissivity; Air annealing; Transmission; THIN-FILMS; TEMPERATURE;

D O I：

10.1016/j.surfcoat.2012.04.001

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Indium tin oxide (ITO) films were deposited on glass substrates at room temperature by direct current magnetron sputtering. And then the films were annealed at different temperature ranging 100-400 degrees C for 1 h in air. Phase, microstructure, resistivity, infrared emissivity and transmission of the films were characterized by X-ray powder diffraction, a scanning electron microscope, a four-point probe, an infrared emissivity measurement instrument and UV-vis-IR spectrophotometery, respectively. The results show that the crystalline phase of the ITO films transforms from amorphous state to polycrystalline cubic bixbyite In2O3 structure at 200 degrees C; the resistivity first decreases with the increasing annealing temperature but then greatly increases: the variation of infrared emissivity with the annealing temperature is same with that of electrical resistivity, which is in consistent with the Hagen-Rubens relation. The film annealed at 200 degrees C shows the lowest resistivity of 6.0 x 10(-4) Omega cm, the lowest infrared emissivity and higher transparency. In addition, in order to study further the effect of annealing on the infrared emissivity, the mean infrared emissivity of the films as a function of temperature were discussed in detail in the process of heating and cooling between room temperature and 350 degrees C. (c) 2012 Elsevier B.V. All rights reserved.

引用

页码：4095 / 4098

页数：4