EFFECT OF DIAPHRAGM PERFORATION ON QUALITY FACTOR OF HEMISPHERICAL RESONATOR GYROSCOPE

被引：0
|
作者：
Vafanejad, Arash [1 ]
Kim, Eun Sok [1 ]
机构：
[1] Univ So Calif, Dept Elect Engn, Los Angeles, CA 90089 USA
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
关键词：
Quality factor; hemispherical resonator gyroscope; thermoelastic damping; perforation; MEMS gyroscope;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this work, thermoelastic damping ( TED) effect of diaphragm perforation on a hemispherical resonator is investigated, and is experimentally shown to improve the quality factor of the resonator. Specifically, this paper reports the quality factor improvement of a very high Q hemispherical resonator gyroscope ( HRG) through making a hole on the micromachined HRG's shell. A hole ( 200 mu m in diameter) at the apex of a hemispherical shell ( 600 mu m in diameter) increases the Q and thereby ring down time by more than 50% and 100% experimentally and theoretically, respectively, for the HRG at an n=2 resonant frequency of 170kHz. Adding such a hole increases the resonant frequency only a few percent.
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页码：27 / 30
页数：4
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