Characterization of N-in-N microstrip radiation detectors fabricated on different silicon substrates

被引:0
|
作者
Fleta, C [1 ]
Lozano, M [1 ]
Campabadal, F [1 ]
Pellegrini, G [1 ]
Rafí, JM [1 ]
Ullán, M [1 ]
Casse, G [1 ]
Allport, PP [1 ]
机构
[1] UAB, CSIC, CNM, IMB, Barcelona 08193, Spain
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
N-in-N microstrip radiation detectors have been fabricated at the IMB-CNM facilities on standard Float Zone, Diffusion Oxygenated Float Zone and magnetic Czochralski silicon substrates. A first electrical characterization shows that the devices have a good behavior, with low leakage currents and an average full depletion voltage of 55 V for the devices processed on Float Zone silicon and 330 V for those processed on Czochralski material.
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页码:513 / 516
页数:4
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