Selected-area deposition of fibrous carbon nanomaterials from ethanol vapor at substrate temperatures below 500°C

被引：1
|
作者：
Red'kin, AN [1 ]
Malyarevich, LV [1 ]
Vakulenko, AA [1 ]
机构：
[1] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia
来源：
INORGANIC MATERIALS | 2005年 / 41卷 / 11期
关键词：
D O I：
10.1007/s10789-005-0278-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Selected-area deposition of fibrous carbon nanomaterials at reduced substrate temperatures via pyrolysis of ethanol vapor is studied. The results demonstrate that, in a reactor fitted with an internal high-temperature heater, deposition is possible at substrate temperatures down to 330-350 degrees C, which is about 150 degrees C lower in comparison with conventional, externally heated reactors.
引用
收藏
页码：1153 / 1156
页数：4
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