3-D THERMAL RADIATION SENSORS ON OPTICAL FIBER TIPS FABRICATED USING ULTRASHORT LASER PULSES

被引：0
|
作者：
Smith, Jonathan W. [1 ]
Suelzer, Joeseph S. [2 ]
Usechak, Nicholas G. [2 ]
Tondiglia, Vincent P. [2 ]
Chandrahalim, Hengky [1 ]
机构：
[1] US Air Force, Inst Technol, Dept Elect & Comp Engn, Wright Patterson AFB, OH 45433 USA
[2] Air Force Res Lab, Wright Patterson AFB, OH USA
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
关键词：
3-D sensors; temperature sensors; heat detectors; fiber tip sensors; Fabry-Perot; two-photon polymerization; GRATING TEMPERATURE SENSOR;
D O I：
10.1109/transducers.2019.8808673
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work demonstrates the first 3-D thermal radiation sensors on optical fiber tips with excellent linear response and sensitivity over a broad range of temperature. A two-photon polymerization (2PP) process was employed to create 3-D thermally responsive structures with submicron precision on fiber tips. This process allows for a single-step writing, maskless, rapid, and low-cost fabrication process to realize sensors with maximum exposure and response to heat radiation. It also enables the integration of packaging free and ready to use sensors on the tip of unconventional substrates, such as optical fiber tips. The released sensor showed linear response over the temperature range of 20-120 degrees C; temperature sensitivity of similar to 50 pm/degrees C at around 1550 nm wavelength; and sensitivity improvement of better than 900% compared to the unreleased sensors.
引用
收藏
页码：649 / 652
页数：4
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