Antireflective Characteristics of Sub-Wavelength Periodic Structure with Square Hole

被引：10
|
作者：
Xu Qi-Yuan [1 ]
Liu Zheng-Tang [1 ]
Li Yang-Ping [1 ]
Wu Qian [1 ]
Zhang Shao-Feng [1 ]
机构：
[1] NW Polytech Univ, State Key Lab Solidificat Proc, Sch Mat Sci & Engn, Xian 710072, Peoples R China
来源：
CHINESE PHYSICS LETTERS | 2011年 / 28卷 / 02期
关键词：
PLANAR-GRATING DIFFRACTION; COUPLED-WAVE ANALYSIS; DESIGN; TECHNOLOGY;
D O I：
10.1088/0256-307X/28/2/024209
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In order to enhance transmittance in the long-wavelength infrared range, the major parameters of periodic subwavelength structures (SWS) with square holes on zinc sulfide (ZnS) substrates are designed and analyzed for applications in normal incidence by using rigorous coupled-wave analysis (RCWA) and thin film theory (TFT). Finally the optimal antireflective parameters are achieved. The structures on ZnS substrates are fabricated on the basis of the simulation results by photolithography technology and reactive ion etching technology. A substantial antireflection effect is observed over the wavelength band 8-12 mu m by a factor greater than 4.5.
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页数：3
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