Design of wide range MEMS tunable capacitor for RF applications

被引：1
|
作者：
Muniraj, N. J. R. [1 ]
机构：
[1] Karpagam Coll Engn, Karpagam Innovat Ctr, Coimbatore, Tamil Nadu, India
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2011年 / 17卷 / 01期
关键词：
Polysilicon; Aluminum Plate; Tuning Range; Fixed Plate; Voltage Control Oscillator;
D O I：
10.1007/s00542-010-1173-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The RF applications like voltage controlled oscillators, tunable filters, resonators etc., requires tunable capacitors in their designs. This paper presents the design of wide range MEMS tunable capacitors for RF applications. This design consists of an air suspended bottom plate and a fixed top plate. The top fixed plate and the suspended bottom plate form the tunable capacitor. The capacitance range of this tunable capacitor is from 69.172 to 138.344 nF. This range is wider compared with the conventional MEMS tunable capacitors of tuning ranges in pico Farads. The fabrication process is similar to that of the existing standard integrated circuit fabrication processes, which makes this design suitable for integrated RF applications.
引用
收藏
页码：31 / 33
页数：3
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