Nanosecond laser writing of straight and curved waveguides in silicon with shaped beams

被引：15

作者：

Wang, Xinya ^{[1
]}

Yu, Xiaoming ^{[2
]}

Berg, Matthew ^{[3
]}

DePaola, Brett ^{[3
]}

Shi, Hongyu ^{[3
]}

Chen, Pingping ^{[1
]}

Xue, Lianjie ^{[3
]}

Chang, Xuefeng ^{[4
]}

Lei, Shuting ^{[1
]}

机构：

[1] Kansas State Univ, Dept Ind & Mfg Syst Engn, Manhattan, KS 66506 USA

[2] Univ Cent Florida, Coll Opt & Photon, Orlando, FL 32816 USA

[3] Kansas State Univ, Dept Phys, Cardwell Hall, Manhattan, KS 66506 USA

[4] Xiamen Univ Technol, Sch Mech & Automot Engn, Xiamen 361024, Peoples R China

来源：

JOURNAL OF LASER APPLICATIONS | 2020年 / 32卷 / 02期

基金：

美国国家科学基金会;

关键词：

beam shaping; waveguide; nanosecond laser; silicon; FEMTOSECOND LASER; CRYSTALLINE SILICON; FUSED-SILICA; WRITTEN; GLASS; FABRICATION; DEEP;

D O I：

10.2351/1.5139973

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The authors demonstrate a method for transverse writing of optical waveguides in a crystalline silicon wafer using a nanosecond laser with a shaped beam profile that is formed by a pair of cylindrical lenses. In contrast to traditional writing methods, this method avoids forming asymmetric waveguide profiles. Both straight and curved waveguides are written with a nearly circular transverse guide profile and are found to support single-mode propagation for 1550 nm wavelength light. The propagation loss for this wavelength is also measured.

引用

页数：6

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