Multiple-Relaxation-Time Lattice Boltzmann method for thermosolutal convection in Czchralski silicon crystal growth

被引:0
|
作者
Huang Weichao [1 ]
Wang Jing [2 ]
机构
[1] Xian Univ Technol, Fac Automat & Informat Engn, Xian 710048, Peoples R China
[2] Xian Univ Technol, Fac Printing Packaging Engn & Digital Media Techn, Xian 710048, Peoples R China
关键词
Lattice Boltzmann Method; Crystal Growth; Numerical Simulation; Thermosolutal Convection; SIMULATION; FLOWS; MODEL;
D O I
10.1109/CCDC52312.2021.9601517
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
A multiple-relaxation-time lattice Boltzmann Method (MRT-LBM) is established to study the thermosolutal mixed convection with multi-physical parameters in the process of silicon crystal growth. The experimental results show that the proposed model for solving the thermosolutal convection has correctness and rapidity in Czchralski (Cz) crystal growth. The melt temperature distribution and the oxygen concentration distribution under different Xe numbers are studied in this paper, which come to the conclusion that the high Reynolds (Re) numbers are helpful to improve the uniformity of the thermosolutal distribution, but it cannot reduce the oxygen concentration effectively. Analysis of the oxygen concentration distributions under the different Cusp magnetic field intensities show that the external magnetic field can force the oxygen concentration gathered at the crucible wall and inhibit the content of oxygen impurity. The oxy gen concentration decreases with the increase of Hartmann (Ha) numbers at the solid-liquid interface, which indicates that the strong magnetic field can reduce the oxygen content of the crystal.
引用
收藏
页码:2042 / 2047
页数:6
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