Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

被引:41
|
作者
Hofstetter, D
Maisenholder, B
Zappe, HP
机构
[1] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA
[2] Balzers AG, FL-9496 Balzers, Liechtenstein
[3] Paul Scherrer Inst, CH-8048 Zurich, Switzerland
关键词
interferometers; monolithic integration; multiwavelength lasers; photonic integrated circuits; quantum-well intermixing;
D O I
10.1109/2944.720492
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Various applications of quantum-well intermixing, ranging from multiwavelength lasers to complex photonic integrated circuits, are described. Thf fabrication of these GaAs-AlGaAs-based devices relies on the postgrowth definition of regions with varying bandgap, enabling the manufacture of wavelength shifted modulators and lasers, as well as the integration of transparent waveguides with absorbing lasers and detectors. The impurity-fret vacancy-enhanced disordering technique employed, and its integration with existing process technologies, will be presented, and examples of multicolor lasers, wavelength shifted modulators and integrated optical interferometers are shown, These applications yield high-optical functionality using relatively simple process and integration technology.
引用
收藏
页码:794 / 802
页数:9
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