An investigation of film thickness effect on mechanical properties of an films using nanoindentation techniques

被引：0
|
作者：
Cao, YF [1 ]
Zong, Z [1 ]
Soboyejo, W [1 ]
机构：
[1] Princeton Univ, PRISM, Princeton, NJ 08544 USA
来源：
THIN FILMS STRESSES AND MECHANICAL PROPERTIES XI | 2005年 / 875卷
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper presents the results of nanoindentation experimental studies of Au thin films with different thicknesses. The effects of film thickness and microstructure on the hardnesses of electron-beam deposited Au films were studied in terms of Hall-Petch relationship. The effects of different thicknesses on indentation size effects (ISE) are explained within the framework of mechanism-based strain gradient (MSG) theory using the concept of microstructural length scale.
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页码：189 / 194
页数：6
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