Application of scanning probe microscopy in nanofabrication

被引：0
|
作者：
Sun, XP [1 ]
Zhang, BL [1 ]
Wang, EK [1 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Appl Chem, Changchun 130022, Peoples R China
来源：
CHINESE JOURNAL OF ANALYTICAL CHEMISTRY | 2003年 / 31卷 / 09期
关键词：
scanning probe microscopy; nanofabrication; application; review;
D O I：
暂无
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Scanning probe microscopy is used not only to obtain atomic resolution surface topography of materials but also to manipulate single atom, molecule and nanoparticle. This article reviews some applications of scanning probe microscopy in nanofabrication including scanning probe lithograpgy of self-assembly monolayers and dip-pen technology. 40 papers are cited.
引用
收藏
页码：1127 / 1130
页数：4
相关论文
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