Diffraction efficiency analysis of blazed grating fabricated by direct laser writing

被引：1
|
作者：
Kuang, Dengfeng [1 ,2 ]
Fang, Zhiliang [2 ]
机构：
[1] Nankai Univ, Inst Modern Opt, Tianjin 300071, Peoples R China
[2] Key Lab Opto Elect Informat Sci & Technol, Minist Educ, Beijing, Peoples R China
来源：
HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS IV | 2010年 / 7848卷
基金：
高等学校博士学科点专项科研基金; 中国国家自然科学基金;
关键词：
diffractive optical elements; direct laser writing; diffraction efficiency; blazed diffractive grating; DESIGN;
D O I：
10.1117/12.866240
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
For the laser spot size, the blazed diffractive grating fabricated with direct laser writing will has a slantwise lateral facet edge. To evaluate the influence of the slope of the facet edge of blazed diffractive grating, we calculate the diffraction efficiencies in +1 order and zero order as a function of the angle for the slantwise lateral facet edge with rigorous coupled wave analysis. As the lateral facet edge is getting more slantwise, the diffraction efficiency in +1 order decrease more, which degrades the image quality in monochromatic imaging. But the diffraction efficiency in zero order always keeps very low to assure the application in optical limiting.
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页数：8
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