Corrections for wavelength variations in precision interferometric displacement measurements

被引：19
|
作者：
Stone, J [1 ]
Phillips, SD [1 ]
Mandolfo, GA [1 ]
机构：
[1] HEWLETT PACKARD CORP, SANTA CLARA, CA 95052 USA
来源：
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY | 1996年 / 101卷 / 05期
关键词：
deadpath; interferometry;
D O I：
10.6028/jres.101.065
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement This paper discusses common errors in applying deadpath corrections and describes the correction necessary to fully account for variations in wavelength.
引用
收藏
页码：671 / 674
页数：4
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