Influence of the Surface Roughness of a Silicon Disk Resonator on Its Q-Factor

被引：2

作者：

Yakuhina, Anastasia, V ^{[1
]}

Kadochkin, Alexey S. ^{[1
]}

Gorelov, Dmitry, V ^{[1
]}

Svetukhin, Vyacheslav V. ^{[1
]}

Generalov, Sergey S. ^{[1
]}

Amelichev, Vladimir V. ^{[1
]}

机构：

[1] Fed State Budgetary Sci Inst, Technol Ctr, Sci Mfg Complex, Off 7237 House 1 Bld 7,Shokina Sq, Moscow 124489, Russia

来源：

PHOTONICS | 2021年 / 8卷 / 06期

关键词：

integrated optics; silicon technology; whispering gallery modes; photonics; ultrahigh-frequency resonator; Q-factor; roughness; OPTICAL FEEDBACK; DFB-LASER;

D O I：

10.3390/photonics8060225

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This article presents a silicon disk resonator of the whispering-gallery-mode (WGM) type. The calculated Q-factor of the silicon WGM resonator was 10(7). Two methods of studying the surface roughness of a silicon WGM resonator with a nonlinear profile by means of Helios 650 scanning electron microscope and Bruker atomic force microscope (AFM) are presented. The results obtained by the two methods agreed well with each other. A comparison of the surface roughness values of WGM resonators manufactured using different technological approaches is presented. Based on the obtained data, a preliminary estimated Q-factor calculation of the resonators was performed, which was refined by numerical calculation using the finite-difference time-domain (FDTD) method. The effect of the surface roughness of the resonator on its Q-factor was found. Reducing the surface roughness of the resonator from 30 nm to 1-2 nm led to an increase in its Q-factor from 10(4) to 10(7).

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页数：12

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