共 50 条
- [2] SINGLE-STEP FABRICATION AND CHARACTERIZATION OF ULTRAHYDROPHOBIC SURFACES WITH HIERARCHICAL ROUGHNESS PROCEEDINGS OF THE ASME PACIFIC RIM TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC SYSTEMS, MEMS AND NEMS 2011, VOL 1, 2012, : 685 - +
- [5] Multilevel microstructure fabrication using single-step 3D photolithography and single-step electroplating MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 : 358 - 366
- [9] Fabrication of accelerometer using Single-step Electrochemical Etching for Micro Structures (SEEMS) MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 61 - 65