Femtosecond laser structuring and plasma polishing of AlN ceramics

被引：0
|
作者：
Kurselis, K. [1 ]
Burgermeister, T. [2 ]
Pyka, K. [2 ]
Keller, J. [2 ]
Partner, H. L. [2 ]
Mehlstaeubler, T. E. [2 ]
Kiyan, R. [1 ]
Reinhardt, C. [1 ]
Chichkov, B. [1 ]
机构：
[1] Laser Zentrum Hannover eV, D-30419 Hannover, Germany
[2] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC) | 2013年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：1
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