Sol-gel deposited Sb-doped tin oxide films

被引：25

作者：

Guglielmi, M ^{[1
]}

Menegazzo, E

Paolizzi, M

Gasparro, G

Ganz, D

Pütz, J

Aegerter, MA

Hubert-Pfalzgraf, L

Pascual, C

Durán, A

Willems, HX

Van Bommel, M

Büttgenbach, L

Costa, L

机构：

[1] Univ Padua, Dipartimento Ingn Meccan, I-35100 Padua, Italy

[2] Ist Giordano SPA, Bellaria, RN, Italy

[3] Inst Neue Mat, INM, D-66123 Saarbrucken, Germany

[4] URA CNRS, Lab Chim Mol, F-06108 Nice, France

[5] CSIC, Inst Ceram & Vidrio, Madrid 28500, Spain

[6] Philips Res Labs, NL-5656 AA Eindhoven, Netherlands

[7] ZGE, Fa E Merc, D-64293 Darmstadt, Germany

[8] Gel Design & Engn GDE, I-28100 Novara, Italy

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 1998年 / 13卷 / 1-3期

关键词：

thin films; transparent conductors; Sb-doped tin oxide; optical properties; electrical properties;

D O I：

10.1023/A:1008636804449

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The structural, electrical and optical properties of single sol-gel derived antimony-doped tin oxide (ATO) films sintered at 550 degrees C have been measured. The reproducibility of both the preparation and the characterization procedures have been tested by a round-robin test involving eight laboratories within a Concerted European Action (CEA) project. The resistivity measured as a function of Sb content has been obtained by electric and reflectance and transmission measurements. Their differences are discussed in terms of structural and grain boundary effects. An increase of Sb content results in a decrease of the crystallite size (7.0 to 5.4 nm) and a greater influence of the grain boundary.

引用

页码：679 / 683

页数：5

共 50 条

[1] Sol-Gel Deposited Sb-Doped Tin Oxide Films
M. Guglielmi
E. Menegazzo
M. Paolizzi
G. Gasparro
D. Ganz
J. Pütz
M.A. Aegerter
L. Hubert-Pfalzgraf
C. Pascual
A. Durán
H.X. Willems
M. Van Bommel
L. Büttgenbach
L. Costa
Journal of Sol-Gel Science and Technology, 1998, 13 : 679 - 683
[2] Transparent and conductive Sb-doped tin oxide SPM tips prepared by sol-gel method
Tätte, T
Avarmaa, T
Lohmus, R
Mäeorg, U
Pistol, ME
Raid, R
Sildos, I
Lohmus, A
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 19 (1-2): : 101 - 104
[3] Fabrication and characterization of pure and Sn/Sb-doped ZnO thin films deposited by sol-gel method
Benelmadjat, H.
Boudine, B.
Halimi, O.
Sebais, M.
OPTICS AND LASER TECHNOLOGY, 2009, 41 (05): : 630 - 633
[4] Densification and carrier concentration in Sb doped sol-gel elaborated tin oxide
Sandu, CS
Roger, JA
Canut, B
Blanchin, MG
Teodorescu, VS
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2001, 156 (1-4): : 129 - 134
[5] Ellipsometric studies of indium tin oxide films deposited by sol-gel process
Stoica, T.F.
Gartner, M.
Stoica, T.A.
Zaharescu, M.
Proceedings of the International Semiconductor Conference, CAS, 1999, 1 : 381 - 384
[6] Electrical and optical properties of Sb-doped ZnO thin films synthesized by sol-gel method
Cao Meng-Meng
Zhao Xiao-Ru
Duan Li-Bing
Liu Jin-Ru
Guan Meng-Meng
Guo Wen-Rui
CHINESE PHYSICS B, 2014, 23 (04)
[7] Optical properties of sol-gel derived Sb-doped silica glass
Susa, K
Satoh, S
Matsuyama, I
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 221 (2-3) : 125 - 134
[8] Tin-doped indium oxide thin films deposited by sol-gel dip-coating technique
Daoudi, K
Canut, B
Blanchin, MG
Sandu, CS
Teodorescu, VS
Roger, JA
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2002, 21 (1-2): : 313 - 317
[9] Properties of titanium oxide films deposited by the sol-gel
Favilla, Pablo
Alterach, Miguel
Rosenberger, Mario
Ares, Alicia
Schvezov, Carlos
Amerio, Osvaldo
TMS 2008 ANNUAL MEETING SUPPLEMENTAL PROCEEDINGS, VOL 3: GENERAL PAPER SELECTIONS, 2008, : 205 - +
[10] Effect of Oxalic Acid on Stabilization and Property of Sb-Doped Tin Oxide Sol
Xiao Chuan Chen
Journal of Sol-Gel Science and Technology, 2005, 34 : 267 - 271

← 1 2 3 4 5 →