EUV extendibility research at Berkeley Lab

被引：0
|
作者：
Naulleau, P. [1 ]
Anderson, C. [1 ]
Benk, M. [1 ]
Chao, W. [1 ]
Goldberg, K. [1 ]
Gullikson, E. [1 ]
Miyakawa, M. [1 ]
Wojdyla, A. [1 ]
机构：
[1] Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
来源：
2017 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA) | 2017年
关键词：
EXTREME-ULTRAVIOLET;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：2
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