Invited paper: Extending resolution limits of IC fabrication technology: Demonstration by device fabrication and circuit performance

被引：0
|
作者：
Nalamasu, O [1 ]
Watson, GP [1 ]
Cirelli, RA [1 ]
Bude, J [1 ]
Kizilyalli, IC [1 ]
Kohler, R [1 ]
机构：
[1] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
来源：
VLSI DESIGN 2001: FOURTEENTH INTERNATIONAL CONFERENCE ON VLSI DESIGN | 2001年
关键词：
D O I：
10.1109/ICVD.2001.902701
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：469 / 469
页数：1
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