共 50 条
- [1] Silicon-containing block copolymer resist materials [J]. MICROELECTRONICS TECHNOLOGY: POLYMERS FOR ADVANCED IMAGING AND PACKAGING, 1995, 614 : 281 - 298
- [8] Oligosaccharide/silicon-containing block copolymers for nanolithography [J]. ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2012, 243