Effect of corona pre-treatment on the performance of gas barrier layers applied by atomic layer deposition onto polymer-coated paperboard

被引:55
|
作者
Hirvikorpi, Terhi [1 ]
Vaha-Nissi, Mika [1 ]
Harlin, Ali [1 ]
Marles, Jaana [2 ]
Miikkulainen, Ville [2 ]
Karppinen, Maarit [3 ]
机构
[1] VTT Tech Res Ctr Finland, FI-02044 Espoo, Finland
[2] Picosun Oy, FI-02150 Espoo, Finland
[3] Aalto Univ, Sch Sci & Technol, Inorgan Chem Lab, Aalto 00076, Finland
关键词
Atomic layer deposition; Corona; Barrier; Packaging material; Silicon oxide; Aluminum oxide; FILMS; POLYETHYLENE; COATINGS;
D O I
10.1016/j.apsusc.2010.07.051
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The effect of corona pre-treatment on the performance of Al(2)O(3) and SiO(2) gas barrier layers applied by atomic layer deposition onto polymer-coated paperboards was studied. Both polyethylene and polylactide coated paperboards were corona treated prior to ALD. Corona treatment increased surface energies of the paperboard substrates, and this effect was still observed after several days. Al(2)O(3) and SiO(2) films were grown on top of the polymer coatings at temperature of 100 degrees C using the atomic layer deposition (ALD) technique. For SiO(2) depositions a new precursor, bis(diethylamido) silane, was used. The positive effect of the corona pre-treatment on the barrier properties of the polymer-coated paperboards with the ALD-grown layers was more significant with polyethylene coated paperboard and with thin deposited layers (shorter ALD process). SiO(2) performed similarly to Al(2)O(3) with the PE coated board when it comes to the oxygen barrier, while the performance of SiO(2) with the biopolymer-coated board was more moderate. The effect of corona pre-treatment was negligible or even negative with the biopolymer-coated board. The ALD film growth and the effect of corona treatment on different substrates require further investigation. (C) 2010 Elsevier B. V. All rights reserved.
引用
收藏
页码:736 / 740
页数:5
相关论文
共 3 条
  • [1] Effect of Heat-Treatment on the Performance of Gas Barrier Layers Applied by Atomic Layer Deposition onto Polymer-Coated Paperboard
    Hirvikorpi, Terhi
    Vaha-Nissi, Mika
    Vartiainen, Jari
    Penttila, Paavo
    Nikkola, Juha
    Harlin, Ali
    Serimaa, Ritva
    Karppinen, Maarit
    JOURNAL OF APPLIED POLYMER SCIENCE, 2011, 122 (04) : 2221 - 2227
  • [2] Effect of an in situ hydrogen plasma pre-treatment on the reduction of GaSb native oxides prior to atomic layer deposition
    Cleveland, Erin R.
    Ruppalt, Laura B.
    Bennett, Brian R.
    Prokes, S. M.
    APPLIED SURFACE SCIENCE, 2013, 277 : 167 - 175
  • [3] Effect on Al:MO2/In0.53Ga0.47As interface (M = Hf, Zr) of trimethyl-aluminum pre-treatment during atomic layer deposition
    Lamperti, A.
    Molle, A.
    Cianci, E.
    Wiemer, C.
    Spiga, S.
    Fanciulli, M.
    THIN SOLID FILMS, 2014, 563 : 44 - 49