Hydrogen Sensing Properties of WO3/Pd composite films

被引：0
|
作者：
Li, Jinhua [1 ,2 ]
Zhao, Meng [1 ,2 ]
Su, Jiangbin [1 ,2 ]
Jiang, Meiping [1 ,2 ]
机构：
[1] Changzhou Univ, Dept Elect Sci & Technol, Changzhou 213164, Jiangsu, Peoples R China
[2] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Peoples R China
来源：
APPLICATIONS OF ENGINEERING MATERIALS, PTS 1-4 | 2011年 / 287-290卷
关键词：
Hydrogen sensor; WO3/Pd composite film; magnetron sputtering; GAS SENSOR; PD;
D O I：
10.4028/www.scientific.net/AMR.287-290.2343
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
WO3/Pd layered composite films were prepared by magnetron Sputtering on glass substrate. After deposition, samples were annealed with different condition. The hydrogen sensitive response of the composite film was measured by home-made measurement system. The results indicated that suitable annealing could increase the response sensitivity of the layered composite film to hydrogen detect, Exorbitant annealing temperature will damage Pd layer on the WO3 suface, then decrease the hydrogen detect sinsitivity badly.
引用
收藏
页码：2343 / +
页数：2
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