Non-self-sustained hollow-cathode glow discharge for large-aperture ion sources

被引：23
|
作者：
Vizir', AV [1 ]
Oks, EM [1 ]
Shchanin, PM [1 ]
Yushkov, GY [1 ]
机构：
[1] Russian Acad Sci, Inst High Current Elect, Siberian Branch, Tomsk 634055, Russia
来源：
TECHNICAL PHYSICS | 1997年 / 42卷 / 06期
关键词：
Glow Discharge; Discharge System; Minimum Pressure; Cathode Cavity; Stable Existence;
D O I：
10.1134/1.1258586
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A discharge system is proposed in which an auxiliary gas discharge is used to inject electrons into the cathode cavity of a hollow-cathode glow discharge. A study is made of the region of stable existence of a non-self-sustaining hollow-cathode discharge. It is shown that the injection of electrons permits a reduction to <10(-2) Pa in the minimum pressure at which a discharge can exist. It is shown experimentally that this discharge can be used to generate wide-aperture ion beams. (C) 1997 American Institute of Physics.
引用
收藏
页码：611 / 614
页数：4
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