New techniques for the measurement of x-ray beam or x-ray optics quality

被引:1
|
作者
Zeitoun, P [1 ]
Balcou, P [1 ]
Bucourt, S [1 ]
Benredjem, D [1 ]
Delmotte, F [1 ]
Dovillaire, G [1 ]
Douillet, D [1 ]
Dunn, J [1 ]
Faivre, G [1 ]
Fajardo, M [1 ]
Goldberg, KA [1 ]
Idir, M [1 ]
Hubert, S [1 ]
Hunter, JR [1 ]
Jacquemot, S [1 ]
Kazamias, S [1 ]
le Pape, S [1 ]
Levecq, X [1 ]
Lewis, CLS [1 ]
Marmoret, R [1 ]
Mercère, P [1 ]
Morlens, AS [1 ]
Naulleau, PP [1 ]
Rémond, C [1 ]
Rocca, JJ [1 ]
Sebban, S [1 ]
Smith, RF [1 ]
Ravet, MF [1 ]
Troussel, P [1 ]
Valentin, C [1 ]
Vanbostal, L [1 ]
机构
[1] Univ Paris 11, Lab Interact Rayonnement 10 Matiere, F-91405 Orsay, France
来源
关键词
x-ray laser; longitudinal coherence; Michelson soft x-ray interferometry; EUV optics;
D O I
10.1117/12.508183
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Metrology of XUV beams and more specifically X-ray laser (XRL) beam is of crucial importance for development of applications. We have then developed several new optical systems enabling to measure the x-ray laser optical properties. By use of a Michelson interferometer working as a Fourier-Transform spectrometer, the line shapes of different x-ray lasers have been measured with an unprecedented accuracy (deltalambda/lambdasimilar to10(-6)). Achievement of the first XUV wavefront sensor has enable to measure the beam quality of laser-pumped as well as discharge pumped x-ray lasers. Capillary discharge XRL has demonstrated a very good wavefront allowing to achieve intensity as high 3*10(14) Wcm(-2) by focusing with a f = 5 cm mirror. The measured sensor accuracy is as good as lambda/120 at 13 nm. Commercial developments are under way.
引用
收藏
页码:194 / 204
页数:11
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