Interfacial effect on thermal conductivity of diamond-like carbon films

被引：9
|
作者：
Kim, Jong Wook [1 ]
Yang, Ho-Soon [2 ]
Jun, Young Ha [3 ]
Kim, Kyung Chun [1 ]
机构：
[1] Pusan Natl Univ, Sch Mech Engn, Pusan 609735, South Korea
[2] J&L Tech Ltd, Kyonggi Do 429450, South Korea
[3] J&L Tech Ltd, Kyonggi Do 429450, South Korea
来源：
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY | 2010年 / 24卷 / 07期
关键词：
Diamond-like Carbon; Hydrogenated amorphous carbon; Thermal conductivity; 3 omega method; THIN-FILMS; RESISTANCE;
D O I：
10.1007/s12206-010-0416-2
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Diamond-like carbon (DLC) has been of interest as a promising coating for protection and insulating layer in micro-electromechanical systems due to high hardness, wear resistance, transparency in IR range, chemical inertness and biocompatibility. The interfacial effect on thermal transport is studied for DLC films deposited on Al2O3 substrates with an ion gun method. Thermal conductivity of DLC thin films is measured with a 3 omega method. DLC films show the thickness-dependent thermal conductivity, which is understood with the interfacial thermal resistance between DLC thin film and Al2O3 substrate. The interfacial thermal resistance and thermal conductivity of bulk DLC are determined with the measured thickness-dependent thermal conductivity of DLC films.
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页码：1511 / 1514
页数：4
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