Silicon-based PbTiO3/Pb(Zr,Ti)O3/PbTiO3 sandwich structure

被引：13
|
作者：
Ren, TL [1 ]
Zhang, LT [1 ]
Liu, LT [1 ]
Li, ZJ [1 ]
机构：
[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 4A期
关键词：
PZT; PT; sandwich structure; ferroelectrics; electrical property;
D O I：
10.1143/JJAP.40.2363
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A silicon-based PbTiO3/Pb(Zr0.53Ti0.47)O-3/PbTiO3 (PT/PZT/PT) sandwich structure prepared by sol-gel method is proposed. The two PT layers in the structure are used as seeding layers to improve the crystallization of the PZT ferroelectric thin films. X-ray diffraction analysis (XRD) and Energy-dispersive X-ray spectroscopy (EDX) results show that the sandwiched PZT films are well crystallized at lower temperature. Compared with the ferroelectric structure with only one PT seeding layer, the electrical and ferroelectric properties of the PZT films in the sandwich structure. are further improved. The maximum dielectric constant of about 900 is obtained at the coercive field 20 kV/cm, and the remnant polarization is 19 muC/cm(2). The leakage current density is less than 5 x 10(-9) A/cm(2) as the applied voltage is below 200kV/cm. The retained polarization does not reduce clearly after 8 x 10(9) read/write cycles.
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页码：2363 / 2366
页数：4
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