Meso scale flextensional piezoelectric actuators

被引:17
|
作者
York, Peter A. [1 ,2 ]
Jafferis, Noah T. [1 ,2 ]
Wood, Robert J. [1 ,2 ]
机构
[1] Harvard Univ, John A Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA
[2] Harvard Univ, Wyss Inst Biol Inspired Engn, Boston, MA 02115 USA
基金
美国国家科学基金会;
关键词
piezoelectric actuators; meso scale devices; multi-material laminates; laser micromachining; micromanipulation; DESIGN;
D O I
10.1088/1361-665X/aa9366
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present an ultra-thin meso scale piezoelectric actuator consisting of a piezoceramic beam and a carbon fiber displacement-amplification frame. We show that the actuator can be designed to achieve a wide range of force/displacement characteristics on the mN/mu m scales. The best performing design achieved a free displacement of 106 mu m and a blocked force of 73 mN, yielding a total energy density of 0.51 Jkg(-1) for the 7.6 mg system. We describe a printed circuit MEMS process for fabricating the actuator that incorporates laser micromachining, chemical vapor deposition, and precision carbon fiber lamination. Lastly, we report the incorporation of the actuator into a microgripper and describe other promising application opportunities in micro-optics and micro-laser systems.
引用
收藏
页数:10
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