High-precision triangulation sensing of mirror surface

被引：3

作者：

Mikhlyaev, SV ^{[1
]}

机构：

[1] Inst Automat & Electrometry, Novosibirsk 630090, Russia

来源：

OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001) | 2001年 / 4416卷

关键词：

triangulation; laser; mirror surface; distance; measurement error; defocusing; gaussian beam;

D O I：

10.1117/12.427095

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The analysis of measurement errors of distance up to a mirror surface by laser triangulation is given. We consider the two types of sensors: with output plane, orthogonal to the optical axis, and with tilted one (corresponding to the Scheimpflug principle). The conditions of Scheimpflug principle applicability for mirror surface testing are determined. We have shown, that at the certain ratio between parameters of optical system of the sensor and the probing light beam, the sensor with orthogonal plane of photoregistration can provide smaller level of measurement errors, than sensor with tilted plane, despite of the presence of defocusing.

引用

页码：400 / 403

页数：4

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