Position sensor for active magnetic bearing with commercial linear optical encoders

被引：2
|
作者：
Tantau, Mathias [1 ,4 ]
Morantz, Paul [1 ,2 ,3 ]
Shore, Paul [1 ,2 ,3 ]
机构：
[1] Cranfield Univ, SATM, Precis Engn Inst, Cranfield, Beds, England
[2] Loxham Precis Ltd, Cranfield, Beds, England
[3] Natl Phys Lab, Teddington, Middx, England
[4] Leibniz Univ Hannover, Hannover, Germany
来源：
CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2021年 / 70卷 / 01期
基金：
英国工程与自然科学研究理事会;
关键词：
Magnetic bearing; Encoder; Micro machining; COMPENSATION;
D O I：
10.1016/j.cirp.2021.04.092
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Active magnetic bearings are used in a number of applications but their disadvantage is the high asynchronous error due to sensor noise amplification. In this paper a new radial position sensor for active magnetic bearings (AMB) based on linear optical encoders is presented. A commercial encoder scanning head faces a round scale with concentric, coplanar lines on its face. Because such a scale is not readily available, it is made by high precision micro machining and different options are compared. In experiments a measurement noise of 3.5 nm at 10 kHz bandwidth is achieved. In addition, a magnetic bearing is built to demonstrate the sensor in closed-loop. (c) 2021 CIRP. Published by Elsevier Ltd. All rights reserved.
引用
收藏
页码：419 / 422
页数：4
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